Features
The Toxic Gas Monitor (TGM) is a multi-point monitoring system that samples the air from various locations in your facility and detects many of the toxic gases used in production.
The air is sampled through plastic tubing that runs from the TGM to as many as 20 remote locations that may be near by or hundreds of feet away.
Typical sampled locations include areas in or around:
- Gas storage areas, such as gas cabinets, gas boxes and gas rooms
- Production tools or process vessels that use toxic gases to produce semiconductors, photovoltaics or process chemicals
- Valve manifold boxes, valve “jungles” and pipe joints
- Exhaust in headers and ducts, scrubber exhaust and plant emissions
The TGM scans very quickly through its sample points and detects at levels that are lower than the established TLV-TWA.
When levels that exceed a warn or alarm set point are detected the TGM takes several seconds to first validate the reading using scrubbers that selectively remove the toxic gases.
If gases are removed and validated correctly, then the TGM displays the warn or alarm event, stores it to memory and prints it (if a printer is connected). At the same time, the TGM activates relays to alert the user to this leak condition.
The user can use the relay outputs to initiate a variety of actions, such as:
- an automatic shut down of gases at the source
- activate an audible and/or visual alarm for security
- activate personnel evacuation alarms
- alert safety and emergency response personnel
Any or all of these actions can be controlled through the user’s PLC. The TGM can also send incident messages and reports to PLCs, facility computers and/or the ATMI LAN - Local Area Network (which can be used with multiple TGMs and other monitors) to provide immediate and complete information about all leak events detected and validated by the TGM.