Do your employees, regulatory agencies and community trust your monitoring solutions?

Modern semiconductor device manufacturing requires chemicals. If an accidental release occurs, an endless variety of "chemical cocktails" can result. The ACM is the only monitor wich can pinpoint and track the release, analyze mixtures, automatically take corrective action and record the result. The ACM monitors for the presence of acids, liquid sources, solvents, noxious and environmentally damaging chemicals - even those wich cannot be reliably detected by other monitors.

Cost-effective, Reliable Monitoring:

Because a single ACM can monitor for as many as fifteen chemicals at each of up to forty locations, and because it requires onlu 10 hours of maintenance each years, never need sensor or tape replacement or field calibration, it usually costs only a fraction of alternatives. In addition, the ACM can monitor for new gases simply by changing software. Point-of-use sensors can be integrated when needed using its GDI (Gas Detector Interface).

FTIR (Fourier Transform Infrared Spectroscopy)

enables the ACM to probe samples with a beam of infrared light and to obtain a complete picture of what is in the air. Infrared spectra not only constitute irrefutable physical evidence, but also allow people to see airborne chemicals. Unlike monitors which use reactive wet chemistry (paper tapes and electrochemical sensors) the ACM continuously prove it is working working by measuring water vapor which is always present in each air sample. In normal operation infrared spectra are automatically read as chemicals and their concentrations. The ACM's software can even re-analyze air spectra stored on disk and determine concentrations of chemicals which were not monitored at the time the spectra were recorded.

Competent monitoring is the result of experience and advanced technology.

Armed with more than two decades of semiconductor-specific application experience, the ACM does away with contamination and disruption of cleanroom operations when gas detectors must be chalenged, calibrated and replaced. It does away with the havoc caused by misidentification of chemicals (false alarms). The ACM can be located close to areas monitored and easily linked to automated control and information management systems.