Chemicals Used (Partial List) | TLV | LDL(in ppm) |
Ammonia | 25 ppm | 0.5 |
BCl3 (as HCl) | no TLV | 1.0 |
BF3 | 1 ppm | 1.0 |
CO | 35 ppm | 1.0 |
C2F6 | no TLV | 0.5 |
Cellosolve Acetate | no TLV | 1.0 |
CF4 | no TLV | 0.1 |
CH3COOH | 10 ppm | 0.5 |
ClF3 (as HF and/or HCl) | 0.1 ppm | 1.0 |
Cyclohexanone | 25 ppm | 1.0 |
Dichlorosilane (as HCl) | no TLV | 1.0 |
Dimethylacetamide | 10 ppm | 1.0 |
Ethyl Lactate | no TLV | 1.0 |
HBr | 3 ppm | 3.0 |
HCl | 5 ppm | 1.0 |
Hexamethyl Disilizane (HMDS) | no TLV | 0.5 |
HF | 3 ppm | 1.0 |
HNO3 | 2 ppm | 0.5 |
Isopropyl Alcohol | 400 ppm | 1.0 |
Methyl Alcohol | 200 ppm | 1.0 |
Methyl Cellosolve | no TLV | 1.0 |
Methyl Cellosolve Acetate | no TLV | 1.0 |
Nitrogen Dioxide (NO2) | 3 ppm | 0.5 |
Nitrous Oxide (NO) | 50ppm | 1.0 |
n-Butyl Acetate | 20 ppm | 1.5 |
NF3 | 10 ppm | 0.1 |
n-Methyl-2-Pyrrolidone | no TLV | 1.0 |
Ozone | 0.05ppm | 0.5 |
SiCl4 (as HCl) | 5.0 ppm | 1.0 |
SF6 | 1000 ppm | 0.01 |
SiF4 | no TLV | 0.5 |
SiHCl3 | 5 ppm | 0.5 |
Silane | 5 ppm | 0.5 |
Tetraethyl orthosilicate (TEOS) | 10 ppm | 0.5 |
trans 1,2-Dichloroethylene | 200ppm | 1.0 |
Triethyl Borate (TEB) | no TLV | 0.5 |
Trimethyl Borate (TMB) | no TLV | 0.5 |
Trimethyl Phosphate (TMP) | no TLV | 0.5 |
Trimethyl Phosphite (TMPI) | 2 ppm | 0.5 |
WF6 (as HF) | No TLV | 1.0 |
Xylenes | 100 ppm | 1.0 |