Specifications
Gas list
| Chemicals Used (Partial List) | TLV | LDL(in ppm) |
|---|---|---|
| Ammonia | 25 ppm | 0.5 |
| BCl3 (as HCl) | no TLV | 1.0 |
| BF3 | 1 ppm | 1.0 |
| CO | 35 ppm | 1.0 |
| C2F6 | no TLV | 0.5 |
| Cellosolve Acetate | no TLV | 1.0 |
| CF4 | no TLV | 0.1 |
| CH3COOH | 10 ppm | 0.5 |
| ClF3 (as HF and/or HCl) | 0.1 ppm | 1.0 |
| Cyclohexanone | 25 ppm | 1.0 |
| Dichlorosilane (as HCl) | no TLV | 1.0 |
| Dimethylacetamide | 10 ppm | 1.0 |
| Ethyl Lactate | no TLV | 1.0 |
| HBr | 3 ppm | 3.0 |
| HCl | 5 ppm | 1.0 |
| Hexamethyl Disilizane (HMDS) | no TLV | 0.5 |
| HF | 3 ppm | 1.0 |
| HNO3 | 2 ppm | 0.5 |
| Isopropyl Alcohol | 400 ppm | 1.0 |
| Methyl Alcohol | 200 ppm | 1.0 |
| Methyl Cellosolve | no TLV | 1.0 |
| Methyl Cellosolve Acetate | no TLV | 1.0 |
| Nitrogen Dioxide (NO2) | 3 ppm | 0.5 |
| Nitrous Oxide (NO) | 50ppm | 1.0 |
| n-Butyl Acetate | 20 ppm | 1.5 |
| NF3 | 10 ppm | 0.1 |
| n-Methyl-2-Pyrrolidone | no TLV | 1.0 |
| Ozone | 0.05ppm | 0.5 |
| SiCl4 (as HCl) | 5.0 ppm | 1.0 |
| SF6 | 1000 ppm | 0.01 |
| SiF4 | no TLV | 0.5 |
| SiHCl3 | 5 ppm | 0.5 |
| Silane | 5 ppm | 0.5 |
| Tetraethyl orthosilicate (TEOS) | 10 ppm | 0.5 |
| trans 1,2-Dichloroethylene | 200ppm | 1.0 |
| Triethyl Borate (TEB) | no TLV | 0.5 |
| Trimethyl Borate (TMB) | no TLV | 0.5 |
| Trimethyl Phosphate (TMP) | no TLV | 0.5 |
| Trimethyl Phosphite (TMPI) | 2 ppm | 0.5 |
| WF6 (as HF) | No TLV | 1.0 |
| Xylenes | 100 ppm | 1.0 |