Specifications
Gas list
| Chemicals Used | TLV | LDL(in ppb or ppm) |
|---|---|---|
| NH3 - Ammonia | 25 ppm | 1 ppm |
| AsH3 - Arsine | 0.05 ppm | 5 ppb |
| B2H6 - Diborane | 0.1 ppm | 10 ppb |
| SiH2Cl2 - Dichlorosilane | no TLV | 0.5 ppm |
| GeH4 – Germane | 0.2 ppm | 25 ppb |
| NF3 - Nitrogen Trifluoride | 10 ppm | 0.1 ppm |
| N2O - Nitrous Oxide | 50 ppm | 0.5 ppm |
| PH3 - Phosphine | 0.3 ppm | 2 ppb |
| POCl3 -Phosphorous Oxychloride | 0.1 ppm | 10 ppb |
| SiH4 - Silane | 5 ppm | 0.5 ppm |
| WF6 – tungsten hexafluoride | No TLV | 0.1 ppm |